Breadcrumb

 
 

Design, analysis and testing of humidity microsensors produced in MITEL 1.5um CMOS technology

Title:

Design, analysis and testing of humidity microsensors produced in MITEL 1.5um CMOS technology

Wang, Lin (2000) Design, analysis and testing of humidity microsensors produced in MITEL 1.5um CMOS technology. Masters thesis, Concordia University.

[img]
Preview
PDF
6Mb

Abstract

The scope of this dissertation research is formulated to develop designs of fully integrated surface micromachined humidity sensors which can be realized using the standard CMOS process, and low cost and efficient post processing techniques. The configurations of resistive and capacitive humidity sensors are designed, analyzed and optimized for miniaturization. The sensing properties of various humidity sensitive materials are reviewed in view of their potential application in microsensors. Polyaniline compound is proposed for fabrication of prototype micro humidity sensors. Analytical models of the resistive and capacitive microsensors are developed to study the steady-state and transient performance characteristics of the sensor. The properties of the proposed compound are analyzed through fabrication and testing of an array of laboratory samples. Different designs of conditioning circuits are further presented for integration. Different post-processings are analyzed, and low cost and efficient post-processing technique for fabrication of humidity sensors, based upon spincoating alone, is proposed

Divisions:Concordia University > Faculty of Engineering and Computer Science > Mechanical and Industrial Engineering
Item Type:Thesis (Masters)
Authors:Wang, Lin
Pagination:xx, 186 leaves : ill. ; 29 cm.
Institution:Concordia University
Degree Name:Theses (M.A.Sc.)
Program:Mechanical and Industrial Engineering
Date:2000
Thesis Supervisor(s):Stiharu, Ion
ID Code:1055
Deposited By:Concordia University Libraries
Deposited On:27 Aug 2009 13:16
Last Modified:08 Dec 2010 10:18
Related URLs:
All items in Spectrum are protected by copyright, with all rights reserved. The use of items is governed by Spectrum's terms of access.

Repository Staff Only: item control page

Document Downloads

More statistics for this item...

Concordia University - Footer