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Modeling, design and fabrication of MEMS filters for RF applications

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Modeling, design and fabrication of MEMS filters for RF applications

Azarnaminy, Siamak Fouladi (2005) Modeling, design and fabrication of MEMS filters for RF applications. Masters thesis, Concordia University.

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Abstract

Currently, micro electro mechanical systems (MEMS) technology has been used in the fabrication and development of several micro devices which cover a broad range of applications. One of these application areas is the telecommunication industry. Current multi-band communication systems depend on off-chip components for frequency selection stages. Since the fabrication of these off-chip components are not compatible with IC fabrication, the electrical connection has to be in the board level, increasing the cost, size and system complexity. Recently MEMS technology has been used in constructing tunable IC components for RF and wireless transceivers, such as resonators, variable capacitors and inductors. These on-chip components can be utilized to implement system on chip (SOC) transceiver architectures with a better performance. This project is focused on modeling, design, and fabrication of band-pass filters for RF applications using MEMS components. The first class of filters is based on MEMS resonators covering a frequency range from 1MHz to 10MHz and the second class of filters use RF MEMS tunable capacitors. The project has two main parts; the first part is dedicated to the behavioral modeling and generating macro models for MEMS resonators that will be used in system level simulation of the final filter, and the second part discusses the design, fabrication, and post processing of both the MEMS resonators and MEMS variable capacitor, besides the experimental results.

Divisions:Concordia University > Faculty of Engineering and Computer Science > Electrical and Computer Engineering
Item Type:Thesis (Masters)
Authors:Azarnaminy, Siamak Fouladi
Pagination:xv, 129 leaves : ill. ; 29 cm.
Institution:Concordia University
Degree Name:M.A. Sc.
Program:Electrical and Computer Engineering
Date:2005
Thesis Supervisor(s):Kahrizi, Mojtaba
ID Code:8486
Deposited By:Concordia University Libraries
Deposited On:18 Aug 2011 14:26
Last Modified:18 Aug 2011 14:26
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