Abstract

MicroElectroMechanical Systems (MEMS) concept covers different miniature devices in different disciplines, including but not limited to biological, chemical, electrical, fluidic, magnetic, optical, and thermal applications. Initially, the background of MEMS, RF MEMS and fabrication technologies are introduced. Then switch and inductor are introduced. Theory, different configurations, designs, and fabrication technologies are considered. Finally proposed designed components are given. Each design is verified through software simulations. Modeling and simulation is the next step. Switches are simulated by MATLAB. Inductors are designed using MATLAB and simulated by ADS-Momentum. Switches are fabricated in the Multi-User MEMS Process (MUMPs) which uses a surface micromachining technique. Inductors are fabricated in both MUMPs and CMOS processes. MUMPs chips require a simple post-fabrication processing that is soaking them in hydrofluoric acid to remove the sacrificial silicon oxide layer For CMOS inductors, bulk-micromachining required post-processing is performed after fabrication

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