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Chemical vapor deposition of polysilicon on a morphous materials

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Chemical vapor deposition of polysilicon on a morphous materials

Pietrantonio, Michel (1983) Chemical vapor deposition of polysilicon on a morphous materials. Masters thesis, Concordia University.

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Divisions:Concordia University
Item Type:Thesis (Masters)
Authors:Pietrantonio, Michel
Pagination:x, 218 leaves : ill. (some col.) ; 29 cm.
Institution:Concordia University
Degree Name:Theses (M.Eng.)
Date:1983
ID Code:5651
Deposited By:Concordia University Libraries
Deposited On:03 Sep 2009 09:44
Last Modified:08 Dec 2010 10:46
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