Abstract

Some novel micro planar optical components (MPOC) and a micro wire grid polarizer are designed and fabricated. As one of the application of MPOC, a device for color recognition is designed and fabricated. Characteristics of mediums like light, silicon dioxide, silicon and polysilicon as well as their interactions with light are discussed. Making use of the theory of optical physics and geometrical optics, the principle of light path control components and the properties of light energy transmission are analyzed. Power loss of MPOC is simulated by specific optics software. Micro wire grid polarizer is designed and fabricated using MUMP technologies with the support of Canadian Microelectronic Corporation (CMC). Different from traditional optical components fabrication process, the fabrication process coming from chip fabrication technology is applied for the first time for making MPOC. Fabrication of MPOC is conducted in micro-fabrication laboratories at Concordia. All devices are fabricated in micron scales and are compatible with optical fibre light coupling. The processes employed here for fabrication of the micro optical components can greatly reduce the components dimensions and decrease the production cost by a mass production supported by the process.