Login | Register

Modeling and parametric analysis of micro thermal actuators


Modeling and parametric analysis of micro thermal actuators

Xu, Shijie (2005) Modeling and parametric analysis of micro thermal actuators. Masters thesis, Concordia University.

[thumbnail of MR10275.pdf]
Text (application/pdf)
MR10275.pdf - Accepted Version


The greatest promise of micro electro mechanical systems (MEMS) lies in the ability to produce mechanical motion on a small scale. Such devices typically run on low power and are fast, taking advantage of such micro scale phenomena as strong electrostatic forces and rapid thermal responses. MEMS-based sensors and actuators have been widely deployed and commercialized. MEMS technologies also have potential applications in optics, transportation aerospace, robotics, chemical analysis systems, biotechnologies, medical engineering and microscopy using scanned micro probes. Microactuators are useful tools for microsystems development. They produce displacement and useful forces to move, grasp or fine tune components of the Microsystems. Thermal actuators are simple devices with good mechanical and dynamic performances. Since integration requires that the designs of the entire system be performed on the micro chip, a good understanding of the performance of the micro thermal actuators is required. Modeling of thermal actuator is a complex task that requires multi physics formulation. In this thesis, a multi-physics analytical model that can accurately predict the performance of a typical U-shaped micro electro thermal actuator fabricated by MUMPS technology is developed and validated through FEM analysis. Further, experiments are carried out on a benchmark micro thermal actuator. On the basis of this model, the relations between geometries of the thermal actuators and their thermal and mechanical behaviors are calculated and mapped out by simulating them in different geometric conditions. A parametric study that evaluates the performance of the devices with respect to the design geometries is carried out. The results are useful for thermal actuator designers

Divisions:Concordia University > Gina Cody School of Engineering and Computer Science > Mechanical and Industrial Engineering
Item Type:Thesis (Masters)
Authors:Xu, Shijie
Pagination:xix, 161 leaves : ill. ; 29 cm.
Institution:Concordia University
Degree Name:M.A. Sc.
Program:Mechanical and Industrial Engineering
Thesis Supervisor(s):Bhat, Rama and Stiharu, Ion
Identification Number:LE 3 C66M43M 2005 X8
ID Code:8521
Deposited By: Concordia University Library
Deposited On:18 Aug 2011 18:27
Last Modified:13 Jul 2020 20:04
Related URLs:
All items in Spectrum are protected by copyright, with all rights reserved. The use of items is governed by Spectrum's terms of access.

Repository Staff Only: item control page

Downloads per month over past year

Research related to the current document (at the CORE website)
- Research related to the current document (at the CORE website)
Back to top Back to top