Abstract

In recent years a great deal of scientific research has been devoted to fabrication of microdevices for continuous monitoring of biological samples. These samples require easy-to-use, low cost and highly sensitive methods for their identification. Micro Electro Mechanical Systems (MEMS) or Microsystem Technology (MST) are considered to be ideal candidates for such applications. Biosensing applications is one of the fields where MEMS are promising to revolutionize both industrial and consumer products. Micro-cantilever beams are one of the MEMS devices that are used to sense enzymatic reactions using Micro Opto Mechanical Systems (MOEMS) and that concept is studied in this thesis. Detection of enzymatic reactions needs analytical modeling to validate with the experimental work done in this thesis. Enzymatic detection is carried under various conditions associated with the surrounding electrostatic field. The basic principles of measurement are then formulated. In the present work, Poly Vinyl Dichloro Fluoride (PVDF) small size cantilever beams are analyzed under the influence of the extra mass which is due to the enzyme droplet on one segment of the beam