Abstract

Medical diagnostics using microsystems have gained a lot of importance in the recent years to develop a fully integrated, cost effective and easy-to-use sensor for in-situ detection of biomolecules. In the present work, the feasibility of developing an evanescent wave biosensor on Silicon-On-Insulator (SOI) platform through waveguide based Micro-Electro-Mechanical Systems (MEMS) is studied. Herein, the proposed waveguide system has been modeled through Finite Difference (FD) technique for different evanescent field conditions and the results for modal parameters have been compared with Finite Element Modeling (FEM) simulated through FEMLAB. Scalar Beam Propagation Method (BPM) simulations have been carried out with R-Soft for rectangular and anisotropic waveguides and the results of propagation constants obtained from R-Soft have been compared with the FD method and FEM