Abstract

Microfluidics and Lab-on-a-Chip devices have the potential to influence subject areas from chemical synthesis and biological analysis to optics and information technology. Micro fabrication is the means of turning the new designs and ideas in micro and nano technology into devices that benefit mankind. Among the materials used in microfluidic devices, glass has very interesting properties such as transparency, chemical resistance, bio-compatibility and low electrical conductivity. Conventional glass patterning can be performed via chemical or physical processes. Spark assisted chemical engraving (SACE) is an unconventional micro-machining technology based on electrochemical discharges used for micro-machining of non-conductive materials. SACE Glass 2D-micro- machining was characterized and parameters affecting the quality and geometry of the micro-channels were presented and the effect of each of the parameters assessed. Chemical contribution to the material removal mechanism is investigated. The results from the FT-IR analysis on the machined sample and Inductive Coupled Plasma Mass Spectrometry (ICP-MS) test showed that chemical etching at high local temperatures is the major phenomenon contributing to the machining process. Calculations of removed mass by analytical balance and geometrical methods, followed by the results from the nano-indentation test indicate that the hardness and density of the machined surface decrease during the machining process. Finally microfluidic components fully fabricated by SACE are presented